2-target RF DC magnetron sputtering PVD coating device
Contact Info
- Add:No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, , Henan, China, Zip: 450000
- Contact: jibin wang
- Tel:86 371 5519 9322
- Email:wjb@cykeyi.com
Other Products
Dual-target magnetron sputtering coater (with RF&DC power supply) TN-MSP300S-RFDC
Dual-target magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It is standardized, modular and customizable. There are 1-inch or 2-inch magnetron targets for you to choose. Customers can choose the target according to the size of the substrate to be coated. The device is equipped with a 500W DC power supply and a 300W RF power supply. The DC power supply can be used for the preparation of metal film, and the RF power supply can be used for the preparation of non-metal. The two targets can meet the needs of multi-layer or multiple coatings.
The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements. The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency. This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.
Dual-target magnetron sputtering coater application:
This device can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. Compared with similar equipment, the dual-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory.
Dual-target magnetron sputtering coater technical parameters:
|
Sample stage |
Size |
φ185mm |
Temperature control accuracy |
±1℃ |
|
Heating temperature |
Max 500℃ |
Rotate speed |
1-20rpm adjustable |
|
|
Magnetron Sputtering target head |
Quantity |
2”×2 (1”,2” optional) |
Water chiller |
Circulating water chiller with flow rate of 10L/min |
|
Cooling mode |
Water cooling |
|
|
|
|
Vacuum chamber |
Chamber size |
φ300mm×300mm |
Watch window |
φ100mm |
|
Chamber material |
Stainless steel |
Opening mode |
Top cover open |
|
|
Mass flowmeter |
2 channels; measuring range 100SCCM; 100SCCM (can be customized according to customer needs) |
|||
|
Vacuum system |
Model |
TN-GZK103-A |
Pumping interface |
KF40 |
|
Molecular pump |
TN-600 |
Exhaust interface |
KF16 |
|
|
Backing pump |
rotary vane pump |
Vacuum measurement |
Compound vacuum gauge |
|
|
Ultimate vacuum |
1.0E-5Pa |
Power supply |
AC;220V 50/60Hz |
|
|
Pumping rate |
Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes |
|||
|
Power configuration |
Quantity |
DC power supply×1 RF power supply×1 |
Max output power |
DC 500W, RF 300 W |
|
Other parameters |
Supply voltage |
AC220V,50Hz |
Overall size |
600mm×650mm×1280mm |
|
Total power |
2.5KW |
Total Weight |
About 300kg |
|
主站蜘蛛池模板： 国产l精品国产亚洲区| 青青狠狠噜天天噜日日噜| 国产精品夜夜春夜夜爽久久小说| 国产精品高潮无码毛片| 亚洲人妻精品中文字幕| 久久精品国产一区二区三区| 免费无码黄十八禁网站| 天天天做夜夜夜做无码| 无码射肉在线播放视频| 亚洲精品无码成人A片九色播放| 亚洲国产一区二区三区久| 桃花岛亚洲成在人线AV| 安宁市| 竹菊影视欧美日韩一区二区三区四区五区 | 日韩国产精品无码一区二区三区| 国内自拍第一区二区三区| 亚洲伊人精品久视频国产| 精品一区二区三区在线成人| 欧洲人妻丰满av无码久久不卡| 日韩精品无码去免费专区| 亚洲人成网站在线播放动漫| 军人粗大的内捧猛烈进出视频 | 久久这里只精品热免费99| 亚洲国产精品色一区二区| 久热久视频免费在线观看| 久久国产精品免费一区| 国产极品粉嫩学生一线天| 四虎影视国产精品永久在线| 一本色道久久东京热| 国产一区二区三区四区色| 精品亚洲AⅤ无码午夜在线| 玩弄放荡人妻少妇系列| 一级国产在线观看高清| 丰满的女邻居2| 精品视频福利| 亚洲av成人久久18禁| 国产精品深夜福利免费观看| 丰满妇女强制高潮18xxxx| 亚洲偷自拍另类一区二区| 在线无码中文字幕一区| 国产主播精品福利午夜二区|